| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet head manufacturing method that enables the manufacture of head chips having various channel characteristics by using a common outside dimension. SOLUTION: The ink-jet head manufacturing method has a counterbored-groove machining step in which a plurality of counterbored grooves 16 are machined along in a direction orthogonal to channels 13 so that a length between the counterbored grooves 16 adjacent to each other becomes a length of two times of the channel characteristics and a pitch of each counterbored groove 16 becomes a pitch of two times of a length of a head chip, a cover substrate joining step for joining a cover substrate onto the surface of a wafer 10 in which the counterbored grooves 16 are machined, and a cutting step for cutting out a large number of head chips in a prescribed size by cutting the wafer 10, onto which the cover substrate is joined, along a cutting line in a direction orthogonal to the channels 13 together with the cover substrate. In the cutting step, one of the two cutting lines for cutting out one head chip is formed from above the counterbored groove 16 along the counterbored groove 16 and the other is formed between the counterbored grooves 16 adjacent to each other. COPYRIGHT: (C)2008,JPO&INPIT
|
