发明名称 Method for the production of a semiconductor component having a metallic gate electrode disposed in a double-recess structure
摘要 The production of a microelectronic component, particularly a pHEMT, having a T-shaped gate electrode in a double-recess structure uses a production method for self-adjusting alignment of the two recesses of the double-recess structure and of the gate foot of the gate electrode.
申请公布号 US2007264763(A1) 申请公布日期 2007.11.15
申请号 US20070800769 申请日期 2007.05.07
申请人 BEHAMMER DAG 发明人 BEHAMMER DAG
分类号 H01L21/338 主分类号 H01L21/338
代理机构 代理人
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