发明名称 |
METHOD OF MOUNTING OBJECTS FOR CHEMICAL VAPOUR DEPOSITION |
摘要 |
A method of coating a surface of an article with a chemical vapour deposition coating such as a diamond like carbon by, for example, pulse DC PACVD or RF PACVD, comprising providing an active electrode, shielding the active electrode with a dielectric shield having at least one aperture to permit access to the active electrode, closing the aperture with a dielectricly shielded support post comprising an electively conductive core in electrical communication via the aperture with the active electrode, placing an article to be coated on the dielectricly shielded support post in electrical communication with the electively conductive core and applying a plasma to the article in presence of an electrical current to the article to provide a coating. The article may be, for example, a piston. A contiguous array of a plurality of similar articles may be simultaneously coated by the method. |
申请公布号 |
WO2007128061(A1) |
申请公布日期 |
2007.11.15 |
申请号 |
WO2007AU00596 |
申请日期 |
2007.05.04 |
申请人 |
COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION;MARTIN, PHIL, J.;BENDAVID, AVI;PRESTON, EDWARD;GROSS, MARK |
发明人 |
MARTIN, PHIL, J.;BENDAVID, AVI;PRESTON, EDWARD;GROSS, MARK |
分类号 |
C23C16/458;C23C16/00;C23C16/26 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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