<p>A contact sensing probe having a stylus (6) which is vibrated longitudinally by a piezoelectric transducer (8). Contact with a workpiece is detected from damping of the vibration. The stylus is mounted to a probe body (4) via parallel diaphragm springs (14,16). These cooperate with a counter mass (24) to form a mechanical low pass filter, which isolates the stylus vibrations from influences caused by the mounting or handling of the probe body.</p>
