SEMICONDUCTOR RESISTOR- TYPE HYDROGEN GAS SENSOR IN TRANSFORMER OIL AND MANUFACTURING METHOD THEREOF

摘要

A semiconductor type hydrogen gas sensor and a manufacturing method thereof are provided to improve a sensitivity for detecting a fault in an insulation oil at an early stage by using a palladium electrode instead of a platinum electrode and inserting an adhesion promoter metal between a substrate and a palladium electrode. A hydrogen gas sensor includes a substrate(101), a junction enhancement metal layer(102), a heater, a catalyst metal layer(103), and a reactive oxide film(104). Device structures are formed on the substrate. The junction enhancement metal layer is bonded with a catalyst metal on the substrate. The heater is formed along a front edge of the substrate. The catalyst metal layer dissociates a hydrogen molecule into hydrogen atoms on the junction enhancement metal layer. The reactive oxide film generates a change of a transition property according to an atomic concentration of hydrogen between the junction enhancement metal layer and the catalyst metal layer.