| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric actuator which can solve the possibility of damages to an actuator consisting of a thin film body, that is superior in assemblability, and can reduce the number of defectives. <P>SOLUTION: The method includes a step S1209 of transferring the thin-film body; step S1210 of deciding the position of the thin-film body on a first positioning base; a step S1211 of sucking the thin-film body using an air hole provided on the first positioning base and fix it; a step S1212 of positioning a flexure, having a thin-film holder on a second positioning base; a step S1213 of applying an adhesive on the thin-film holder; a step S1214 of allowing the thin-film body to make it face the thin-film holder applied with the adhesive of the flexure, and ensuring a gap between the thin-film holder and the thin-film body and positioning it; and a step S1215 of allowing the air hole to discharge air to bond the thin-film body on the thin-film holder, in a state where the thin-film body is pressed against the thin-film holder of the flexure. <P>COPYRIGHT: (C)2008,JPO&INPIT |
