| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity acceleration sensor capable of detecting also an acceleration applied continuously. SOLUTION: This acceleration sensor has a base part 2; leg parts 3-6; fixed parts 8, 9; an excitation means for exciting and vibrating the leg parts 3, 4 symmetrically and simultaneously exciting and vibrating the leg parts 5, 6 symmetrically with respect to a YZ-plane passing the middle line between the leg parts 3, 4 and between the leg parts 5, 6, and exciting and vibrating the leg parts 3, 4 and the leg parts 5, 6 in each reverse phase; and a detection means for taking out a voltage signal by bending vibration of the leg parts 3-6 along the Z-axis direction, and detecting an acceleration applied from the Z-axis direction, based on the voltage signal. COPYRIGHT: (C)2008,JPO&INPIT
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