| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve drive capable of minimizing formation of particles in a vacuum valve being opened and closed by linear motion, in particular, in a vacuum transfer valve, and compacting the outside dimension in the flowing direction to save a space. SOLUTION: This vacuum valve drive 1 comprises a drive housing 5 containing a gas-tight working space 6, a piston 7 inside the working space 6, and at least one connecting rod 8, 9 led from the working space 6 in a gas-tight manner to the valve sealing device 2. This vacuum valve drive 1 comprises a (static) guide rod 11 extending centrally and parallel to the adjustment axis 3 inside the working space 6 and led through the piston 7, and a precision linear bearing 12 disposed between the piston 7 and the guide rod 11. COPYRIGHT: (C)2008,JPO&INPIT
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