| 摘要 |
In an optoelectronic hybrid integrated module, an insulating layer 31 is overlaid on a substrate 3, an insulating layer 2 containing an optical waveguide 21 is formed on the insulating layer 31, a lower ground electrode 61, an upper ground electrode 62, conductive vias 71, and the like are electrically connected on and under the insulating layer 2, and the optical waveguide 21 is coupled with a transmitting portion 11 mainly composed of a light emitting device and a transmitting LSI and with a receiving portion mainly composed of a light receiving device and a receiving LSI. Signal light for driving the light emitting device in the transmitting portion 11 is coupled with the optical waveguide 21 and optically transmitted. Although stray light 41 which is not incident on the optical waveguide 21 is transmitted in the insides of the substrate 3 and the insulating layer 2 or in a space together with electromagnetic noise 42, they are scattered by the conductive vias 71 and reflected by the upper and lower ground electrodes 61, 62, thereby only signal light is coupled with the light receiving device of the receiving portion 12.
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