| 摘要 |
Harmonic capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided In a preferred embodiment, a harmonic cMUT device (100) generally comprises a membrane (115) having a non-uniform mass distribution A mass load (155, 160) positioned along the membrane (115) can be utilized to alter the mass distribution of the membrane (115) The mass load (155, 160) can be a part of the membrane (115) and formed of the same material or a different material as the membrane (115) The mass load (155, 160) can be positioned to correspond with a vibration mode of the membrane (115), and also to adjust or shift a vibration mode of the membrane (115) The mass load (155, 160) can also be positioned at predetermined locations along the membrane (1 15) to control the harmonic vibrations of the membrane (115) A cMUT (100) can also comprise a cavity (150) defined b the membrane (115), a first electrode (130a-c) proximate the membrane (1 15), and a seocnd electrode (110) proximate a substrate (105) Other embodiments are also claimed and described. |
