SERVER DEVICE, AND PROGRAM

摘要

[PROBLEMS TO BE SOLVED] In a conventional group management system, a problem is that, when abnormalities are analyzed after detection, time sequential information cannot be taken or displayed for every device of semiconductor manufacturing devices, and the like. [MEANS FOR SOLVING THE PROBLEMS] Data measured in a plurality of semiconductor manufacturing devices are time sequential information. The measured data have device identifiers for identifying the semiconductor manufacturing devices and time information, and a plurality of the measured data are stored. When abnormality is analyzed after detection, a chart output instruction including the device identifiers is received, and a plurality of the measured data having not less than one device identifier contained in the output instruction are read out. Charts in such a way that measured data are visually distinguishable for every device identifier are composed of the read out measured data. A server device that outputs the composed chart can take out the time sequential information for every device of the semiconductor manufacturing device, etc., and display the same.