发明名称 |
SERVER DEVICE, AND PROGRAM |
摘要 |
<p>[PROBLEMS TO BE SOLVED] Conventionally, filtering of information measured in the number of product wafers cannot compose a chart. [MEANS FOR SOLVING THE PROBLEMS] Measured data in a plurality of manufacturing devices are time sequential information. The measured data have the number of product wafers and time information. A server device is comprised of an instruction reception unit for storing a plurality of the measured data, and for receiving an output of a chart instruction including the number of the product wafers; an abnormality detecting unit for reading out a plurality of measured data in conformity with conditions of the number of product wafers in clued in the output instruction and for judging whether a plurality of the read out measured data are in conformity with condition information when the instruction reception unit receives the output instruction; an output information composing unit for composing output information in accordance with a judging result of the abnormality detecting unit; and output unit for outputting the output composed by the output composing unit, so that filtering of the information measured in the number of product wafers can compose a chart.</p> |
申请公布号 |
WO2007129567(A1) |
申请公布日期 |
2007.11.15 |
申请号 |
WO2007JP58791 |
申请日期 |
2007.04.24 |
申请人 |
TOKYO ELECTRON LIMITED;INOKAWA, TAKUMI;KOYAMA, NORIAKI |
发明人 |
INOKAWA, TAKUMI;KOYAMA, NORIAKI |
分类号 |
H01L21/02;G05B19/418;G05B23/02;H01L21/205;H01L21/3065;H01L21/66 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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