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发明名称
DETERMINING EPITAXIAL LAYER THICKNESS ON SEMICONDUCTOR BY INFRARED INTERFERENCE
摘要
申请公布号
CA680441(A)
申请公布日期
1964.02.18
申请号
CAD680441
申请日期
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
MORRIS TANENBAUM;WILLIAM G. SPITZER
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