| 摘要 |
PROBLEM TO BE SOLVED: To prevent errors in mass numbers obtained as a result of mass spectrometry from being generated since the height of the upper surface of a sample to be analyzed is changed by the nonplanarity of the upper surface of a sample stand, the deformation, or the like of a sample plate. SOLUTION: When the sample 3 to be analyzed reaches a measurement position by the travel of the sample stand 1, a displacement sensor 12 measures the amount of displacement in the height of the upper surface of the sample 3, and an amount-of-displacement correction control section 17 drives a displacement drive section 16 based on the measurement value and finely moves the sample stand 1 in the direction of Z axis. Thus, whichever sample on the sample plate 2 is analyzed, distance (d) between the upper surface of the sample and an ion extraction electrode 9 is maintained fixedly, thus dispensing with variations in flight distance and making the operation of an ion extraction electric field equal. COPYRIGHT: (C)2008,JPO&INPIT |
