| 摘要 |
<p>[PROBLEMS] To provide an imaging method capable of imaging a pattern image on a substrate at a precise position while relatively moving the substrate and an imaging apparatus. [MEANS FOR SOLVING PROBLEMS] An imaging method comprises: an imaging step for imaging a pattern image on a substrate while relatively moving the substrate and a camera; a shift amount estimation step for estimating, for imaging the pattern image on the substrate, according to the relative movement speed and movement distance between the substrate and the camera, the shift amount between an imaging target position and an actual imaging position on the substrate when an imaging trigger is generated without correction; and an imaging trigger correction step for shifting the timing of generating the imaging trigger by a time equivalent to the estimated shift amount. The shift amount estimation step includes a reference substrate imaging step for imaging a reference substrate while relatively moving the reference substrate and the camera, a measurement step for measuring, from the image imaged in the reference substrate imaging step, the shift amount between the image target position and the actual imaging position obtained by the imaging trigger without correction, and an estimation step for estimating the shift amount according to the measured shift amount.</p> |
