SURFACE CLEANING METHOD, DEVICE MANUFACTURING METHOD, CLEANING ASSEMBLY, CLEANING APPARATUS, AND LITHOGRAPHIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of effectively cleaning a surface of an optical element.

SOLUTION: A surface cleaning method comprises: a step of using a contaminant liberating device 40 to at least partly liberate individual contaminants from a surface 21 with a contaminant liberating beam 41, and a step of using a contaminant removing device 10 to capture the at least partly liberated individual contaminants. The contaminant removing device 10 generates at least one optical trap 15 to trap the at least partly liberated individual contaminants.

COPYRIGHT: (C)2008,JPO&INPIT