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发明名称
PHOTOACTIVE COMPOUNDS
摘要
The present invention relates to novel photoacid generators.
申请公布号
WO2007057773(A3)
申请公布日期
2007.11.15
申请号
WO2006IB03315
申请日期
2006.11.15
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
RAHMAN, DALIL, M.;PADMANABAN, MUNIRATHNA
分类号
G03F7/004;G03F7/039
主分类号
G03F7/004
代理机构
代理人
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