USE OF ELECTRODES TO CANCEL LIFT EFFECTS IN INERTIAL SENSOR

摘要

A MEMS gyroscope and a method for reducing errors in the gyroscope are provided to measure Coriolis force applied to at least one inertial mass generated from a gyroscope motion. A MEMS gyroscope includes at least one inertial mass and at least one sensing electrode. The inertial mass is connected to a time-varying drive voltage source. The sensing electrode is arranged adjacent to each of the inertial masses. A sensing bias voltage source is connected to the inertial mass to generate charges between the inertial masses and the sensing electrode. A sensing unit measures Coriolis force applied to the inertial masses and outputs a velocity signal corresponding to a rotation speed. At least one vertical motion adjusting voltage member(94) is arranged adjacent to each of the inertial masses and is electrically connected to the voltage.