| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact switching device in which cracks of a glass board to seal a groove to become a flow passage of a fluid are prevented. SOLUTION: The contact switching device is provided with a silicon board 1 in which a groove part 2 that becomes a flow passage of a fluid and a liquid storing part 3 communicated with a groove part 2 are formed, and in which a diaphragm 4 is installed on the rear face side of the liquid storing part 3, with a conductive fluid 6 movably arranged in the groove part 2 and in the liquid storing part 3, with a glass board 7 joined to one face of the silicon board 1, with contact parts 25a, 25b installed in a state that at least one part is made to be faced to the groove part 2, and with a piezoelectric actuator which by pushing and moving a pivot 4a installed at the upper face of the diaphragm, deforms the diaphragm 4, and moves the conductive fluid 6. At one face of the silicon board 1, electrode pads 21a, 21b electrically connected to the respective contacts 25a, 25b are installed, and metal thin wires 24 inserted into a through hole 23 of the glass board 7 are applied of wire bonding at the respective electrode pads 21a, 21b. COPYRIGHT: (C)2008,JPO&INPIT
|
