| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device for a PDP substrate and a defect inspection method capable of obtaining a precise defect location even if the defect inspection is carried out with the substrate in a state of thermal expansion, and capable of improving production efficiency. SOLUTION: The defect inspection device comprises an inspection table 21 to mount the PDP substrate 20 on which a dielectric layer is formed, a lighting means (coaxially inclined lighting device 29) which irradiates light on the PDP substrate 20, a light receiving means 28 which detects reflection light when light is irradiated on the PDP substrate 20 by the lighting means, defect detection means (34, 35) which detect the size and location of a defect by using data detected by the light receiving means 28, a temperature detection means (light volume-substrate temperature conversion means 31) which detects the temperature of the PDP substrate 20, correction location detection means (32, 33) which obtain a correction location of the defect by using the temperature detected by the temperature detection means and correcting the location, and a defect correctness judging means 36 which carries out judgement on the correctness or quality of the defect by using the size and correction location of the defect. COPYRIGHT: (C)2008,JPO&INPIT
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