| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine structure which easily handles a chip, by protecting a movable body part, in handling of the chip with the micromachine formed therein. SOLUTION: The micromachine has the movable body part such as a micromirror part 100 supported by a spring and rotatable at a very small angle, and is formed as a structure for preventing the movable body part from contacting with the other object in handling, by arranging a metallic bridge 200 so as to cover at least the movable body part. COPYRIGHT: (C)2008,JPO&INPIT
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