| 摘要 |
<p>A coating apparatus having a substrate coating carrier is provided to reduce a manufacturing cost by manufacturing easily a substrate carrier from a glass ceramic. A coating apparatus for manufacturing a solar cell includes a substrate carrier(1) for coating a substrate. The substrate carrier is basically formed with a glass-ceramic material. The substrate carrier is basically formed with a Schott Robox or a Neo Ceram N-11. The substrate carrier is basically designed as a rectangular plate(2) and includes a plurality of adjacent receptacles(3,5) for receiving adjacent substrates on a main surface. The adjacent reception parts include recesses at the substrate carrier. The adjacent receptacles are separated by a strut bar.</p> |
