NANO-LIQUID CRYSTAL ON SILICON (LCOS) CHIP HAVING REDUCED NOISE

摘要

An LCoS chip (100) designed to suppress electrical noise due to cross-talk between electrical components of the chip and stray light entered into the chip. The chip (100) includes a silicon substrate (120) having an array of memory cells formed thereon. The chip (100) includes the first polycrystalline silicon layer (302) that forms word lines and a metal layer (413) that forms bit lines (304), wherein the bit lines (304) are directed orthogonal to the word lines. The chip (100) also includes capacitor storages (308) formed of the second and third polycrystalline silicon layers (310, 312). The second polycrystalline layer (310) is disposed over the first polycyrstalline silicon layer (302) and over regions of the substrate (100) not covered by the word lines. The metal layer (413) includes shields (432) to reduce cross-talk between neighboring bit lines (304) as well as between the bit lines (304) and capacitor storages (308).