| 摘要 |
<p>Provided is an apparatus for cleaning a planar object comprising upper and lower cleaning rollers respectively contacting upper and lower surfaces of a conveyed planar object to adhesively remove foreign substances stuck to the planar object, characterized in that the apparatus further comprises a non-contact drive mechanism for driving the lower cleaning roller using a varying magnetic force. Therefore, the apparatus for cleaning a planar object employs a mechanism for simultaneously driving lower cleaning rollers and conveyance rollers in a non-contact manner using magnetic forces, thereby preventing generation of foreign substances and improving reliability of a cleaning process.</p> |
