ELECTRONIC LENS

摘要

Provided is a small-size electronic lens having a small aberration for use in a microscope and an evaluation device using an electronic beam. The electronic lens is characterized in that its characteristic can be modified in a short time without using a complicated correction device. In the electronic lens, a correction electrode (11) is arranged in the vicinity of objective lenses (12, 13) as electrostatic lenses for correcting the aberration. Alternatively, a correction mechanism formed by a magnet is arranged in the vicinity of the objective lenses as magnetic lenses for correcting the aberration.