| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface treatment method of a group III nitride crystal which can remove impurities such as abrasive grains remaining in a surface of the group III nitride crystal after polishing by slurry comprising abrasive grains. <P>SOLUTION: The surface treatment method of the group III nitride crystal comprises a process for polishing a surface of the group III nitride crystal 1 by polishing slurry comprising abrasive grains, and thereafter polishes it at least once by a polishing solution 27. In each polishing process by the polishing solution 27, a basic polishing solution or an acid polishing solution is used as the polishing solution 27. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
