| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced-pressure dryer with a simplified composition capable of preventing re-attachment of a volatilized solvent or the like to a glass substrate while evenly drying the glass substrate. SOLUTION: A piping 5 allowing selective passing of exhaust air E providing a pressure-reduced state in a pressure reduction chamber 3, and suction air I increasing a pressure of the pressure reduction chamber 3 is connected to a lower part of a chamber 4. A resistor 28 is provided for applying predetermined resistance to the suction air I passing through the piping 5. An attachment preventing body 21 is arranged between a connection part of the piping 5 with the chamber 4 and the glass substrate 2. By carrying out exhaust and suction from the lower part of the chamber 4, the composition is simplified without having to provide a dispersion plate or the like above the glass substrate, and the glass substrate 2 can be evenly dried. Since the resistor 28 applies the predetermined resistance to the suction air I, and the attachment preventing body 21 prevents blowing to the glass substrate 2, re-attachment of the volatilized solvent or the like to the glass substrate 2 during pressure increase of the pressure reduction chamber 3 can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
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