| 摘要 |
An optical apparatus includes a light source for emitting laser light perpendicularly to a surface of a semiconductor substrate; a positioning member for positioning the light source; an aperture stop defining an opening for limiting transmission of laser light emitted from the light source; a light detection member, provided on or close to the positioning member, for detecting an intensity of laser light; a reflection member, provided on the aperture stop, for reflecting the laser light from the light source toward the light detection member; and an adjusting means for adjusting an intensity of laser light emitted from the light source on the basis of a detection result of the light detection member.
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