| 发明名称 |
Monitoring slot formation in substrates related application |
| 摘要 |
A light beam is used to cut a slot in a first side of substrate. An optical sensor monitors a surface of a second side of the substrate that is opposite the first side while cutting the slot. If the light beam breaks through the surface of the second side, the sensor detects the light beam.
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| 申请公布号 |
US2007263231(A1) |
申请公布日期 |
2007.11.15 |
| 申请号 |
US20070880728 |
申请日期 |
2007.07.24 |
| 申请人 |
SCOTT GRAEME;O'BRIEN SEAMUE;CAMPBELL-BROWN LAIN |
发明人 |
SCOTT GRAEME;O'BRIEN SEAMUE;CAMPBELL-BROWN LAIN |
| 分类号 |
G01B11/14;G01N21/00 |
主分类号 |
G01B11/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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