发明名称 |
Plasma source, has plasma container in housing for surrounding plasma cavity, and metal block electrically staying in connection with anode, where coating made of electrically high-conductive material is provided on external side of block |
摘要 |
<p>The plasma source has a housing (1) at a ground potential, where a plasma container is provided in the housing for surrounding a plasma cavity (2). A metal block (4) electrically stays in connection with an anode (6) and electrically isolated against the housing by an insulator (5). The insulator is formed by an insulating ring made from an electrically non-conductive material e.g. ceramic. A coating made of an electrically high-conductive material e.g. silver or gold, is provided on the external side of the metal block.</p> |
申请公布号 |
DE102006062710(A1) |
申请公布日期 |
2007.11.15 |
申请号 |
DE20061062710 |
申请日期 |
2006.04.27 |
申请人 |
IPT IONEN- UND PLASMATECHNIK GMBH |
发明人 |
PREIS, GREGOR |
分类号 |
H05H1/34;H05H1/46 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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