发明名称 SENSORS FOR ELECTROCHEMICAL, ELECTRICAL OR TOPOGRAPHICAL ANALYSIS
摘要 <p>Sensors (100, 520) and systems for electrical, electrochemical, or topographical analysis, as well as methods of fabricating these sensors are provided The sensors include a cantilever (110, 524) and one or more probes (120, 522), each of which has an electrode (126) at its tip (122) The tips of the probes are sharp, with a radius of curvature of less than about 50 nm In addition, the probes have a high aspect ratio of more than about 19 :1. The sensors are suitable for both Atomic Force Microscopy and Scanning Electrochemical Microscopy.</p>
申请公布号 WO2006034470(A3) 申请公布日期 2007.11.15
申请号 WO2005US34234 申请日期 2005.09.23
申请人 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY;PRINZ, FRIEDRICH, B.;TAO, YE;FASCHING, RAINER, J.;GRECO, RALPH, S.;HAMMERICK, KYLE;SMITH, ROBERT, LANE 发明人 PRINZ, FRIEDRICH, B.;TAO, YE;FASCHING, RAINER, J.;GRECO, RALPH, S.;HAMMERICK, KYLE;SMITH, ROBERT, LANE
分类号 B82B1/00;B82B3/00;G01Q10/00;G01Q60/02;G01Q60/38;G01Q60/60;H01L21/3065 主分类号 B82B1/00
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