ANODIC BONDING OF POLYMERS TO GLASS, SILICON OR OTHER MATERIALS

摘要

A method of anodically bonding a polymer layer with a substrate. The method includes providing a substrate, placing a polymer layer in contact with the substrate, providing a source of cations, configured for supplying cations into the polymer layer, heating the substrate, the polymer layer and the source of cations and applying a voltage across the source of cations and the polymer layer sufficient to create an electrostatic field at the interface between the substrate and the polymer layer causing the polymer layer and the substrate to come sufficiently close to one another to bond the polymer layer with the substrate.