METHOD AND STRUCTURE FOR CREATION OF A METAL INSULATOR METAL CAPACITOR,申请号WO2007EP54257-传众专利搜索

发明名称	METHOD AND STRUCTURE FOR CREATION OF A METAL INSULATOR METAL CAPACITOR
摘要	<p>The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer.</p>
申请公布号	WO2007128754(A1)	申请公布日期	2007.11.15
申请号	WO2007EP54257	申请日期	2007.05.02
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;IBM UNITED KINGDOM LIMITED;BOLAM, RONALD;COOLBAUGH, DOUGLAS;DOWNES, KEITH;ESHUN, EBENEZER;FEILCHENFELD, NATALIE;HE, ZHONG-XIANG	发明人	BOLAM, RONALD;COOLBAUGH, DOUGLAS;DOWNES, KEITH;ESHUN, EBENEZER;FEILCHENFELD, NATALIE;HE, ZHONG-XIANG
分类号	H01L21/02	主分类号	H01L21/02
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