INSPECTION APPARATUS OF FPD PATTERN UNDERGOING FIRING USING EMISSIVITY OF THE PATTERN

摘要

An apparatus for inspecting a flat panel display pattern firing using emissivity of the pattern is provided to find out a firing state of the pattern in a non-contact and nondestructive manner during a firing process. An emissivity measuring unit measures emissivity of a flat panel display pattern(112) formed on a substrate(110). A comparator compares the measured emissivity with a preset reference value, and judges whether the flat panel display pattern is properly fired if the compared result is within a predetermined range. The emissivity measuring unit has a probe(120) irradiating light onto the flat panel display pattern and receiving the light reflected from the flat panel display pattern, and an emissivity calculator(150) calculating the emissivity.