发明名称 METHOD AND INSTALLATION FOR THE PRODUCTION OF BLOCKS OF A SEMICONDUCTOR MATERIAL
摘要 <p>The invention relates to an installation (10) for the production of blocks of a semiconductor material, consisting of: at least one first chamber (12, 14) containing an atmosphere with at least one inert gas and comprising a fusion system (42) which is adapted to melt the semiconductor material, a purification system (46) which is adapted to remove impurities from the molten semiconductor material and a system (20) for moving a crystallisation crucible (32) containing the purified molten semiconductor material; and at least one second chamber (14) which is connected to the first chamber by means of an opening, a mobile part (18) being adapted to seal said opening hermetically. The aforementioned movement system (20) is designed to move the crystallisation crucible into the second chamber before the purified molten semiconductor material begins to solidify, said second chamber containing a cooling system which promotes the solidification of the material.</p>
申请公布号 EP1742870(B1) 申请公布日期 2007.11.14
申请号 EP20050746642 申请日期 2005.04.19
申请人 EFD INDUCTION SA 发明人 RIVAT, PASCAL;DEL GOBBO, JEAN-PIERRE
分类号 C01B33/037;C30B11/00;C30B29/06;H01L31/18 主分类号 C01B33/037
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