| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact heat treatment apparatus for a glass substrate which efficiently and continuously heats and dries the glass substrate. <P>SOLUTION: In this heat treatment apparatus for the glass substrate B, carry-in and carry-out ports for the glass substrate B are disposed and a revolvingly moving mechanism 2 which vertically elongates and revolvingly moves the glass substrates B around a virtual axis line in the state of erecting the glass substrates B is disposed inside a heating chamber 6 in which a heater 5 is disposed on the inner peripheral surface. Therein, the glass substrates B which are continuously carried in through the carry-in port in order are heated in the state of being erected, at the same time, are revolvingly moved and are carried out through the carry-out port. <P>COPYRIGHT: (C)2003,JPO</p> |
