发明名称 |
Bimorphically actuated, oscillating micromirror |
摘要 |
The micro-mirror has a movable part (11) with two torsion arms (14) comprising an end (14.1) connected to a fixed part (12) through a bimorph actuation unit (15). The actuation unit has a stack (15.1) packed with arranged or connected layers. The stack has a part (15.3) made up of active material cooperating with a passive flexible structure (15.2), where the material can change volume and/or shape under excitation effect. An independent claim is also included for a method for manufacturing a micro-mirror. |
申请公布号 |
EP1519213(B1) |
申请公布日期 |
2007.11.14 |
申请号 |
EP20040104284 |
申请日期 |
2004.09.06 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
FILHOL, FABIEN |
分类号 |
G02B26/08;G02B26/10;B81B3/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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