| 摘要 |
A wide-area nano-size imprinting stamp 10 is disclosed. The wide-area nano-size imprinting stamp 10 includes a substrate 11 having a base surface 13 upon which is formed a plurality of micro-features 21. Each micro-feature 21 includes a plurality of spacers 23 disposed on opposed side surfaces (22a, 22b) thereof. The spacers 23 extend laterally outward of the opposed side surfaces (22a, 22b) and the micro-features 21 and the spacers 23 extend outward of the base surface 13. The micro-features 21 and the spacers 23 are selectively etched to differing heights (h1, h2) to define an imprint stamp 20 having an imprint profile 24. The imprint stamps 20 can be formed on substantially all of a useable area AU of the substrate 11 and can have complex shapes that vary among the imprint stamps 20. The imprint stamps 20 can be used as a template for transferring the imprint profile 24 to a mask layer 65 in which the imprint profile 24 will be replicated. <IMAGE> |
