发明名称
摘要 A metal mask structure in which a metal mask 12 for depositing a thin layer is welded to a support frame 11 and the welding portion is placed within at least a substrate to be deposited, characterized in that a concave part 12 a is formed on an opposite surface of a surface of said metal mask which is contacted to the frame, and the metal mask and the support frame are welded to each other within the concave part.
申请公布号 JP4006173(B2) 申请公布日期 2007.11.14
申请号 JP20000255781 申请日期 2000.08.25
申请人 发明人
分类号 C23C14/24;H05B33/10;B32B3/10;B32B15/04;C23C14/04;C23C14/12;H01L21/285;H01L51/50;H01L51/56;H05B33/12 主分类号 C23C14/24
代理机构 代理人
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