| 发明名称 |
Apparatus and method for measuring the optical performance of an optical element |
| 摘要 |
A measuring apparatus includes a first measuring system for measuring optical performance of a target optical system using a light splitting optical element, and a second measuring system for measuring optical performance of the optical element.
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| 申请公布号 |
US7295326(B2) |
申请公布日期 |
2007.11.13 |
| 申请号 |
US20050095890 |
申请日期 |
2005.03.31 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HASEGAWA MASANOBU |
| 分类号 |
G01B11/02;G01M11/02;G02B27/00;G03F7/20;G03F7/207;H01L21/027;H04B10/08 |
主分类号 |
G01B11/02 |
| 代理机构 |
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