发明名称 Method for forming pattern of liquid crystal display device and method for fabricating thin film transistor array substrate of liquid crystal display device using the same
摘要 A method for forming a pattern of a liquid crystal display device is provided. The method includes providing a substrate having a layer to be patterned, providing a master substrate having an intaglio portion corresponding to a desired pattern, filling an organic material into the intaglio portion of the master substrate, placing the master substrate in contact with the substrate, hardening the organic material to produce a hardened organic film pattern, transferring the hardened organic film pattern onto a surface of the layer to be patterned by separating the master substrate from the substrate, and etching the layer to be patterned by using the organic film pattern as a mask.
申请公布号 US7295256(B2) 申请公布日期 2007.11.13
申请号 US20040934497 申请日期 2004.09.07
申请人 LG.PHILIPS LCD CO., LTD. 发明人 KIM JIN OOK
分类号 G02F1/136;G02F1/133;G02F1/1362;G02F1/1368;G03F7/00;H01L21/00;H01L29/786 主分类号 G02F1/136
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