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发明名称
Apparatus for the irradiation or vacuum-coating of specimens
摘要
申请公布号
US3140393(A)
申请公布日期
1964.07.07
申请号
US19620180513
申请日期
1962.03.19
申请人
HANS LIST
发明人
BUSCH SIEGFRIED;HATSCHEK RUDOLF;PISCHINGER FRANZ
分类号
C23C14/50;G21K5/08
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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