发明名称 |
Conformal coatings for micro-optical elements, and method for making the same |
摘要 |
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film conforms to surface structures having varying complex dimensions.
|
申请公布号 |
US7294360(B2) |
申请公布日期 |
2007.11.13 |
申请号 |
US20030404928 |
申请日期 |
2003.03.31 |
申请人 |
PLANAR SYSTEMS, INC. |
发明人 |
MAULA JARMO ILMARI;TOERNQVIST RUNAR OLOF IVAR |
分类号 |
B05D5/06;C23C16/44;C23C16/455;G02B1/10;H01S5/028 |
主分类号 |
B05D5/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|