| 发明名称 |
Electronic device manufacture |
| 摘要 |
Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
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| 申请公布号 |
US7294453(B2) |
申请公布日期 |
2007.11.13 |
| 申请号 |
US20040782657 |
申请日期 |
2004.02.19 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
GALLAGHER MICHAEL K.;YOU YUJIAN |
| 分类号 |
G03F7/00;B29C67/20;H01L21/312;H01L21/316;H01L21/48;H01L21/768;H05K1/02 |
主分类号 |
G03F7/00 |
| 代理机构 |
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代理人 |
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