| 摘要 |
<p>A method and a device for scribing a substrate by using synchronized multiple axes are provided to form scribe lines in directions of X and Y simultaneously without any re-arrangement of a parent substrate, thereby reducing the time required for the scribe lines and increasing productivity. A method and a device for scribing a substrate(50) by using synchronized multiple axes includes tables(45) movably mounted on a base(40) and loading a substrate to move the substrate in a direction. First and second head guides(60,70) are disposed on the tables in first and second directions and respectively have first and second lifting elements for lifting a plurality of first and second heads(65,75). The plurality of first and second heads are mounted on the first and second guides in advance by a set interval for respectively forming first and second scribe lines, wherein the first and second scribe lines are perpendicular to each other. A control part controls moving speeds of the tables. A camera reads first and second marks(52a-52e,53a-53e) formed on the substrate.</p> |
