| 摘要 |
FIELD: microelectronics. ^ SUBSTANCE: microscopic stage can be used for development of technological end test equipment. Samples of different sizes and shapes can be placed on same microscopic stage which doesn't result in worsening of admissible forces of shift. Bends of sample are reduced by several orders under vacuum areas. Thinner samples cab used for operation. Microscopic stage has base with flat surface. Deepenings and opening are made on surface. Opening leads to vacuum pump. Deepenings are connected with opening, leading to vacuum pump. Deepenings are made in form continuous relief; size of deepening varies from 3 to 100 microns. All deepenings are connected one with another. ^ EFFECT: simplified design; eased technology of production. ^ 1 dwg |
