| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment gas discharging device wherein an external dielectric can be brought closer to an object to be treated. <P>SOLUTION: This treatment gas discharging device is equipped with a tubular external dielectric 22 having a supply hole 23 in its upper peripheral surface and a discharge hole 24 in its lower peripheral surface, an external electrode 26 grounded and provided on the outer peripheral surface of the external dielectric 22, a tubular internal dielectric 30 coaxially provided in the inside of the external dielectric 22 with a fixed interval left from it, a tubular internal electrode 32 provided in the inside of the internal dielectric 32 in parallel with its axial line, a high frequency power supply 34 to impress a high frequency voltage between the internal electrode 32 and the external electrode 26, and a gas supply mechanism to supply a treatment gas between the external dielectric 22 and the internal dielectric 30 from the supply hole 23. The internal electrode 32 is formed so that its lower peripheral part leans inward, and is structured so that the lower peripheral part is parted from the inner peripheral surface of the internal dielectric 30. <P>COPYRIGHT: (C)2008,JPO&INPIT |
