发明名称 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method |
摘要 |
An illumination optical apparatus has a beam splitting member which splits an incident beam into a first light beam and a second light beam to form a first illumination region and a second illumination region, a first light-guide optical system which guides the first light beam to the first illumination region, and a second light-guide optical system which guides the second light beam to the second illumination region locate apart from the first illumination region.
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申请公布号 |
US2007258077(A1) |
申请公布日期 |
2007.11.08 |
申请号 |
US20070783561 |
申请日期 |
2007.04.10 |
申请人 |
NIKON CORPORATION |
发明人 |
TANAKA HIROHISA;KOMATSUDA HIDEKI |
分类号 |
G03B27/54 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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