| 摘要 |
A method is provided for processing parts in more than one bath of dense phase carbon dioxide wherein the processing includes transferring dense phase carbon dioxide from a storage tank to a cleaning chamber, processing said parts in said cleaning chamber with said dense phase carbon dioxide, withdrawing at least a part of said dense phase carbon dioxide from said cleaning chamber, distilling said withdrawn dense phase carbon dioxide, and transferring said distilled carbon dioxide back to said storage tank, wherein said distilled carbon dioxide is cooled prior to being transferred to said storage tank and said cooling is carried out depending on the temperature and/or the pressure in the storage tank and/or the cleaning chamber.
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