MANUFACTURING METHOD FOR SUSCEPTOR AND SUSCEPTOR USING THIS METHOD

摘要

The invention relates to a method of manufacturing a susceptor, in a way of joining a susceptor body and a cover together while simultaneously embedding a heater. The method includes preparing a susceptor cover having one or more projections, preparing a susceptor body having grooves corresponding to the projections of the susceptor cover, and fitting the susceptor cover in the susceptor body through forging, in which at least one of each of the projections and each of the grooves is plastically deformed during the forging, thus enabling a close fit therebetween, wherein at least one of each of the projections and each of the grooves is partially changed in sectional shape such that the projection and the groove have different sectional areas, when viewed in an insertion direction.